| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously realize both optimization of a material like a combination type and excellent transmission efficiency of ultrasonic vibration like a solid single-piece type. SOLUTION: A resonator 2 has a vibration converting part 3 and an annular protrusion 4. By an electroplating method using a plating liquid prepared by mixing a nickel sulfate solution with diamond powder, a blade 5 mainly consisting of diamond grows with the annular protrusion 4 as a seed. Next, a peripheral part of the annular protrusion 4 is removed by etching such that the peripheral part is located inside a peripheral part of the blade 5. Thus, the peripheral face of the vibration converting part 3 formed in the resonator 2 is formed with the blade 5 supported by the annular protrusion 4.
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