| 摘要 |
PROBLEM TO BE SOLVED: To provide a polybenzoxazole resin which has excellent electrical and thermal properties, hardly absorbs water, and is suitable for the use in semiconductor fields. SOLUTION: A polybenzoxazole precursor is provided which has repeating units represented by formula 1 (n is an integer of 1-1,000; R1 to R6 are each independently a fluoroalkyl; R7 and R8 are each independently H or a monovalent organic group; i is an integer of 1-8; j is an integer of 0-7 provided i+j<=8; and Y is a tetravalent aromatic group provided -OR7 and -OR8 are bonded to adjacent carbon atoms of the aromatic group). A polybenzoxazole resin is provided which has a structure formed by the cyclodehydration of the polybenzoxazole precursor.
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