摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inexpensive, small-sized and simple-to-use gas purifying device without needing a vacuum exhaust device having the combination of an expensive turbo-molecular pump (or oil diffusion pump) and an oil rotation pump. SOLUTION: This device has a small-sized refrigeration machine 2 mounted to a vacuum vessel 1, gas coolers 31 and 32 housed in the vacuum vessel 1 and mounted to the small-sized refrigeration machine 2, heat exchangers 41 and 42 housed in the vacuum vessel 1 and connected to the gas coolers 31 and 32, an impurity removing filter 5 housed in the vacuum vessel 1 and whose one end is connected to the gas cooler 32 and whose other end is connected to the heat exchanger 42 and activated carbon 6 housed in the vacuum vessel 1 and mounted at the low temperature end of the small-sized refrigeration machine 2.</p> |