发明名称 GAS PURIFYING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide an inexpensive, small-sized and simple-to-use gas purifying device without needing a vacuum exhaust device having the combination of an expensive turbo-molecular pump (or oil diffusion pump) and an oil rotation pump. SOLUTION: This device has a small-sized refrigeration machine 2 mounted to a vacuum vessel 1, gas coolers 31 and 32 housed in the vacuum vessel 1 and mounted to the small-sized refrigeration machine 2, heat exchangers 41 and 42 housed in the vacuum vessel 1 and connected to the gas coolers 31 and 32, an impurity removing filter 5 housed in the vacuum vessel 1 and whose one end is connected to the gas cooler 32 and whose other end is connected to the heat exchanger 42 and activated carbon 6 housed in the vacuum vessel 1 and mounted at the low temperature end of the small-sized refrigeration machine 2.</p>
申请公布号 JP2001162127(A) 申请公布日期 2001.06.19
申请号 JP19990350226 申请日期 1999.12.09
申请人 SUMITOMO HEAVY IND LTD 发明人 YAMADA TOSHIHARU
分类号 B01D53/04;F04B37/16;(IPC1-7):B01D53/04 主分类号 B01D53/04
代理机构 代理人
主权项
地址