发明名称 |
Electrostatic chucks with flat film electrode |
摘要 |
An electrostatic chuck having an essentially flat film electrode which is essentially parallel to the chucking surface of the electrostatic chuck is fabricated by depositing a film electrode, preferably by screen printing, onto a surface of a sintered ceramic substrate. A green ceramic layer is formed or molded onto the film electrode and the resulting structure is sintered, thereby producing the electrostatic chuck. |
申请公布号 |
AU4516701(A) |
申请公布日期 |
2001.06.18 |
申请号 |
AU20010045167 |
申请日期 |
2000.12.05 |
申请人 |
SAINT-GOBAIN CERAMICS AND PLASTICS, INC. |
发明人 |
RAMESH DIVAKAR;MORTEZA ZANDI |
分类号 |
H01L21/683;H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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