PLANAR OPTICAL AMPLIFIER USING AEROSOL PROCESS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A planar optical amplifier using an aerosol process and a method for manufacturing the same are to dope plenty of erbium into the optical amplifier without a clustering phenomenon by utilizing the aerosol process, thereby reducing a length of the amplifier and a manufacturing cost. CONSTITUTION: A planar optical amplifier includes a silicon substrate(10), an underclad(20), a core(30) which is formed by an aerosol process, and an overclad(40) formed by using the aerosol process. In a method for manufacturing a planar optical amplifier, an underclad is formed on a silicon substrate. A core layer is formed using an aerosol process. The core layer is patterned into a predetermined configuration, thereby forming a core. An overclad is formed using the aerosol process. In the manufacturing step of the core layer, a sol solution is prepared in advance. An aerosol is formed using the sol solution and is deposited on the underclad. An annealing process is carried out for melting the deposited aerosol. A glass film is formed by cooling the melted aerosol.