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发明名称
VERFAHREN UND VORRICHTUNG ZUR ZUFÜHRUNG VON REAGENZIEN IN DAMPFFORM IN EINEN CVD-REAKTOR
摘要
申请公布号
AT201721(T)
申请公布日期
2001.06.15
申请号
AT19940913894T
申请日期
1994.03.07
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
KIRLIN, PETER S.;GARDINER, ROBIN A.;VAN BUSKIRK, PETER
分类号
F04B53/02;B01F3/02;B01J4/02;B01J7/00;C01B21/076;C01G1/00;C01G3/00;C01G23/00;C04B38/00;C23C16/40;C23C16/44;C23C16/448;F04B53/16;F23K5/22;H01L39/24;(IPC1-7):C23C16/00;B01F3/04;F01B31/00
主分类号
F04B53/02
代理机构
代理人
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