OPTICAL SWITCH HAVING MICRO STRUCTURE

摘要

PURPOSE: An optical switch having a micro structure is provided to improve the capacity such as in location precision, power consumption, expandability, and mass production by providing a latch-up structure of a curved leaf spring. CONSTITUTION: In the optical switch having a micro structure, a mobile structure(21) having a mirror on one side moves back and forth in parallel with the mirror. A leaf spring(26) having elasticity is connected on both sides of the mobile structure(21). The leaf spring(26) looks in the vertical direction to the mobile structure(21). The leaf spring(26) has at least a pair of shallow arch for latch-up function. An actuator provides force for moving the mobile structure(21). Anchors(22) hold tight the mobile structure(21) on both sides.