发明名称 Mini-environment control system and method
摘要 A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure generates and maintains a controlled vacuum in the individual enclosure. Transfer means introduce the sample into the individual enclosure and extract it therefrom. The micropumps of the array of micropumps can be of a type employing the thermal transpiration effect. Temperature and pressure microsensors and a gas analyzer enable the operation of the array of micropumps to be controlled by an onboard microcomputer. The atmosphere surrounding a sample is therefore controlled.
申请公布号 US2001003572(A1) 申请公布日期 2001.06.14
申请号 US20000729779 申请日期 2000.12.06
申请人 BERNARD ROLAND;CHEVALIER ERIC 发明人 BERNARD ROLAND;CHEVALIER ERIC
分类号 B65G49/00;F04B19/00;H01L21/66;H01L21/673;(IPC1-7):F04B19/24 主分类号 B65G49/00
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