发明名称 |
Mini-environment control system and method |
摘要 |
A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure generates and maintains a controlled vacuum in the individual enclosure. Transfer means introduce the sample into the individual enclosure and extract it therefrom. The micropumps of the array of micropumps can be of a type employing the thermal transpiration effect. Temperature and pressure microsensors and a gas analyzer enable the operation of the array of micropumps to be controlled by an onboard microcomputer. The atmosphere surrounding a sample is therefore controlled.
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申请公布号 |
US2001003572(A1) |
申请公布日期 |
2001.06.14 |
申请号 |
US20000729779 |
申请日期 |
2000.12.06 |
申请人 |
BERNARD ROLAND;CHEVALIER ERIC |
发明人 |
BERNARD ROLAND;CHEVALIER ERIC |
分类号 |
B65G49/00;F04B19/00;H01L21/66;H01L21/673;(IPC1-7):F04B19/24 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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