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发明名称
Verfahren zur Herstellung einer Halbleiter-Kondensator-Elektrode
摘要
申请公布号
DE69427176(D1)
申请公布日期
2001.06.13
申请号
DE1994627176
申请日期
1994.09.02
申请人
NEC CORP., TOKIO/TOKYO
发明人
TOSHIYUKI, HIROTA
分类号
H01L27/04;H01L21/02;H01L21/3213;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/320
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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