METHOD OF CLEANING FLUORINE-CONTAINING RUBBER MOLDED ARTICLE FOR SEMICONDUCTOR PRODUCTION DEVICE

摘要

To provide a novel and effective cleaning method which can give a cleaned fluorine-containing rubber molded article for semiconductor production apparatuses. The method of cleaning the fluorine-containing rubber molded article for semiconductor production apparatuses, which comprises washing the fluorine-containing rubber molded article at least once with ultra pure water which has a metal content of not more than 1.0 ppm and does not contain fine particles of not less than 0.2 mu m in an amount of more than 300 per 1 ml.