METHOD OF MANUFACTURING LINEAR MOTOR, LINEAR MOTOR, STAGE PROVIDED WITH THE LINEAR MOTOR, AND EXPOSURE SYSTEM

摘要

A coil frame 24 of an armature coil unit 23 constituting a linear motor R1 comprises a pair of holding portions 26 and 26 and a connection portion 27 that connects these holding portions 26 and 26 to each other, and grooves 28 that holds ends 25a of the respective flat coils 25 are formed at an interval corresponding to an array interval of permanent magnets.