Method for damping ribbon elements in a micromechanical grating device by selection of actuation waveform

摘要

A method for damping electro-mechanical ribbon elements over a channel defining a bottom surface and having a bottom conductive layer formed below said bottom surface includes the steps of: providing at least one constant amplitude voltage pulse to at least one ribbon element wherein the actuation pulse causes said ribbon element to contact the bottom surface of the channel; and providing at least one braking pulse to the ribbon elements wherein the braking pulse is separated by a narrow temporal gap from the constant amplitude voltage pulse. Furthermore, the method can also provide a sophisticated damping for ribbon elements which are actuated so that they do not contact the bottom of the channel. <IMAGE> <IMAGE> <IMAGE>