THREE-DIMENSIONAL SHAPE MEASURING METHOD AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To remove adversary influence of frequency unstableness caused by a phase shift method. SOLUTION: A light intensity pattern following a sine-wave-shaped periodic function is irradiated to an object with a phase being shifted, and the three- dimensional shape of the object is measured based on an imaging result obtained by imaging it. Plural light intensity patterns following periodic functions having different wavelengths respectively are irradiated so that respective light intensity patterns do not interfere with each other. The least common multiple among the wavelengths of each periodic function is set larger than a range having the frequency unstableness in the imaging region.