| 摘要 |
PROBLEM TO BE SOLVED: To provide a mold or a mold master for a micro-structural body with small in-surface distribution of a size thereof and its manufacturing method. SOLUTION: A method for manufacturing a mold or a mold master for a micro-structural body includes (1) a process of preparing a substrate 1 having a conductive portion 2, (2) a process of forming a first masking layer 3 on the conductive portion 2, (3) a process of making the conductive portion 2 exposed by forming a plurality of openings 4 in the first masking layer 3, (4) a process of forming a first plated layer 6 on the openings 4 and the first masking layer 3 by means of an electroplating method using the conductive portion 2 as a cathode, (5) a process of forming a second masking layer 7 on the openings 4 and a selected area of the first plated layer 6 and (6) a process of removing the area of the first plated layer 6 having no second masking layer 7 by means of an electrolytic etching method in which voltage is impressed by use of the conductive portion 2 as an anode. |
