发明名称 PARTICLE DISPERSING ELEMENT FOR CALIBRATING PARTICLE COUNTER
摘要 PROBLEM TO BE SOLVED: To provide a particle dispersing element capable of favorably calibrating a counter for measuring foreign matter in a solvent for manufacturing an electric material. SOLUTION: This particle dispersing element for calibrating the particle counter features that it comprises an organic polymer particle with an average particle size of 0.05 to 10μm and a coefficient of variation of the particle size of 10% or less dispersed in an organic solvent.
申请公布号 JP2001159589(A) 申请公布日期 2001.06.12
申请号 JP19990341129 申请日期 1999.11.30
申请人 JSR CORP 发明人 FUKAI YOSHIKAZU
分类号 H01L21/02;G01N1/00;G01N15/00;(IPC1-7):G01N1/00 主分类号 H01L21/02
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