发明名称 |
PARTICLE DISPERSING ELEMENT FOR CALIBRATING PARTICLE COUNTER |
摘要 |
PROBLEM TO BE SOLVED: To provide a particle dispersing element capable of favorably calibrating a counter for measuring foreign matter in a solvent for manufacturing an electric material. SOLUTION: This particle dispersing element for calibrating the particle counter features that it comprises an organic polymer particle with an average particle size of 0.05 to 10μm and a coefficient of variation of the particle size of 10% or less dispersed in an organic solvent.
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申请公布号 |
JP2001159589(A) |
申请公布日期 |
2001.06.12 |
申请号 |
JP19990341129 |
申请日期 |
1999.11.30 |
申请人 |
JSR CORP |
发明人 |
FUKAI YOSHIKAZU |
分类号 |
H01L21/02;G01N1/00;G01N15/00;(IPC1-7):G01N1/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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