摘要 |
PROBLEM TO BE SOLVED: To provide a connecting device and an inspection system that prevent the damage of electrodes such as contact terminals and semiconductor elements by securing the tracing operation of a group of contact terminals. SOLUTION: The connecting device coming into contact with an electrode on an object to be inspected for transferring an electric signal is equipped with a support member 7, a multilayer film 6, presser members 8 and 22 of the multilayer film, a tentative correcting-of-parallelism support member 10 of the presser members, a contact pressure application means 13 that allows each contact terminal tip to come into contact with each electrode, and compliance mechanisms 13a and 14a, where the compliance mechanisms push presser members to the tentative correcting-of-parallelism support member by the press mechanisms 13 and 14 with a plurality of spring properties for supporting, allow the tip end face of a group of contact terminals 4 to come into contact with the surface of a group of electrodes for surfacing the presser member from the tentative correcting-of-parallelism support member and for engaging the presser member with the support member so that the tip end face of the group of contact terminals is allowed to correct parallelism after the surface of the group of electrodes.
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