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发明名称
摘要
申请公布号	JP3174416(B2)	申请公布日期	2001.06.11
申请号	JP19920352735	申请日期	1992.12.10
申请人		发明人
分类号	C03C17/25;C03C17/30;C04B41/50;C04B41/87;C09D183/05;C23C18/12;H01L21/312;H01L21/316;(IPC1-7):H01L21/312	主分类号	C03C17/25
代理机构		代理人
主权项
地址

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