MANUFACTURING METHOD FOR THIN FILM MAGNETIC HEAD, INSPECTING DEVICE, AND INSPECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method capable of manufacturing a high performance thin film magnetic head, including an inspection process in which the track width can be measured with high accuracy in a short time. SOLUTION: This manufacturing method has a thin film forming process of forming a lamination film constituting the thin film magnetic head on a substrate, and an inspection process of measuring the size of a predetermined portion of the lamination film. In the inspection process, illuminating light having a wavelength of 400 nm or less is applied from a light source 7 to the lamination film and light from the lamination film is imaged on a CCD 24 by lens optical systems 13, 24. A calculator 27 measures the size from the image.