| 摘要 |
An apparatus (52) for moving substrates between a loading of such substrates and a working chamber comprises frame (32) and a loading station connected to the frame and having at least two loading locations (31) wherein the plurality of substrates may be supplied or received in stacked form therein. A plurality of load locks (16) are provided at a second station located each directly oppositely of the locations (31) at the loading station and corresponding in number to the locations at the loading station. A substrate handling means (52) is disposed between the loading and the second stations for picking up and moving one or a plurality of ones of the substrates between the loading and second stations.
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