Micro-production process comprises forming electrolyte solution, treating polymer substrate, micro-processing, and contacting with plate cathode

摘要

A micro-production process comprises forming an electrolyte solution, treating a polymer substrate, micro-processing and contacting with a plate cathode. A micro-production process comprises forming an electrolyte solution to fill a system for electroforming; selecting a polymer substrate which absorbs the electrolyte solution and treating the outer surface of the substrate and forming an electrically insulating mask film on the outer surface; micro-processing the substrate to form a three-dimensional microstructure having a number of deep recesses in the substrate; contacting the substrate with a plate cathode and dipping into the electrolyte solution; galvanically filling the recesses of the substrate with metal or alloy and desorbing the solvent in the electrolyte to shrink the substrate and separate the microstructure.