FLUORORESIN MATERIAL LOWLY PERMEABLE TO LIQUID CHEMICAL

摘要

A resin material which has improved impermeability to liquid chemicals and improved cracking resistance while retaining the excellent heat resistance and processability inherent in FEPs. It gives a molded article suitable for use in the field of semiconductor production apparatuses, etc. The resin material and the molded article each comprises a fluorocopolymer comprising 85 to 95.5 mol% repeating units derived from tetrafluoroethylene, 5 to 10 mol% repeating units derived from hexafluoropropylene, and 0.1 to 5 mol% repeating units derived from at least one higher perfluoro(vinyl ether) represented by the formula (1): CF2=CF-O-Rf<1> (wherein Rf<1> is C5-10 perfluoroalkyl or C4-17 perfluoroalkoxyalkyl).