发明名称 Verfahren zur Herstellung monolithisch integrierter Halbleiterbauelemente
摘要 The invention relates to a method for producing monolithically integrated semiconductor components in an original wafer. At least one polysilicon diode is additionally integrated into a polycrystalline silicon layer that is applied on the original wafer. According to the invention, the charge carrier areas (32', 36') of the at least one polysilicon diode (14) are doped at the same time as the functional charge carrier areas (32, 36) of the semiconductor component (10).
申请公布号 DE19958162(A1) 申请公布日期 2001.06.07
申请号 DE19991058162 申请日期 1999.12.02
申请人 ROBERT BOSCH GMBH 发明人 BAUR, MARKUS
分类号 H01L21/8249;H01L27/02;H01L27/06;(IPC1-7):H01L21/822;H01L23/60;H01L29/861 主分类号 H01L21/8249
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