SEMICONDUCTOR MICRO-ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor micro-actuator capable of reducing the energy necessary for displacing a movable element. SOLUTION: A movable element 2 having a rectangular peripheral edge is mounted inside of a frame-like supporting base 1 displaceably in the thickness direction of the supporting base 1. The supporting base 1 and the movable element 2 are connected through an arm member 3 capable of displacing the movable element 2 by its thermal expansion and contraction. The arm member 3 has a flexible part 8 obtained by stacking a flexible layer 7 on a flexible layer 6, and the flexible part 8 is deflected by the heat generated in accompany with the energization to the flexible layer 7, whereby displacing the movable element 2. The arm member 3 is connected to two sides along the longitudinal direction of the movable element, and extended in parallel with a central line along the lateral direction of the movable element 2.