| 摘要 |
PURPOSE: A vertical depositing apparatus is to prevent damage of a substrate when performing a depositing process, and provide a sensor for detecting the damage of the substrate to prevent further damage of the substrate. CONSTITUTION: An upper clamp(56) is formed at an upper portion of a platen(52) to guide a substrate(50) and has a groove formed at a contacting portion with the substrate. A lower clamp(58) is formed at a lower portion of the platen to guide the substrate together with the upper clamp and has a stepped portion which is respectively coupled to the substrate and a susceptor(54). An upper sensor(66) for detecting damage of the substrate is disposed in the susceptor to be opposite to an upper face of the substrate. A lower sensor(68) is disposed at the lower portion of the platen to detect the damage at other portions of the substrate. A controlling portion controls driving of the platen and a process responding to a signal detected by the upper and lower sensor. And a stopper pin(60) is disposed at a lower portion of the lower clamp to support the substrate along with the upper clamp. |
