METHOD OF MANUFACTURING FOR FLOATING MEMBER ELECTRICALLY CONNECTING TWO MUTUALLY MOVABLE PARTS OF MICROMECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing for a floating member for electrically connecting two mutually movable parts of a micro-mechanism. SOLUTION: This method for manufacturing a floating member for electrically connecting two mutually movable parts of a micro-mechanism comprises a process for forming a sacrifice material layer, a process for electrically forming a connecting member on the sacrifice material layer, and a process for electrically removing the sacrifice layer under the connecting member, and the sacrifice material layer is a thin film having at least one adhesive surface attachable to a surface of the micro-mechanism in a dry state.