| 摘要 |
PURPOSE: A purifying apparatus of a chamber is to smoothly discharge exhaust gas even when a gas cleaning device is out of order, thereby always maintaining the chamber in a normal state. CONSTITUTION: A gas cleaning device(44A,44B) discharges exhaust gas of a chamber to an outside. A back-up gas cleaning device(54) discharges the exhaust gas of the chamber to the outside according to change of discharging pressure of the gas cleaning device. A discharge controlling portion closes a discharging pipe between the chamber and the gas cleaning device, and opens a discharging pipe between the chamber and the back-up gas cleaning device when detecting the change of the discharging pressure of the gas cleaning device. The discharging pipes between the chamber and the gas cleaning device, and the chamber and the back-up gas cleaning device are disposed in parallel. The first discharging valve(58A,58B,58C,58D) is disposed at the discharging pipe between the chamber and the gas cleaning device to open/close the pipe. The second discharging valve(58A',58B',58C'58D') is disposed at the chamber and the back-up gas cleaning device to open/close the pipe. |
