| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of deterioration in magnetic shielding property and increase in the amount of beam drift, caused when the invar alloy used in press type is used as a semi-tension mask type mask material to be formed into mask by applying tension. SOLUTION: The Fe-Ni alloy for semi-tension mask has a composition consisting of, by mass, 34-45% Ni, 0.01-0.5% Mn and the balance Fe with inevitable impurities. Further, in the surface of the alloy sheet after final cold rolling, the sum of (111) aggregation degree and (220) aggregation degree,α(111)+(220), represented by the following equation [1] is regulated to >=15%.
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