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经营范围
发明名称
Method and apparatus for processing a wafer to remove an unnecessary substance therefrom
摘要
申请公布号
GB2349742(B)
申请公布日期
2001.05.30
申请号
GB20000007920
申请日期
2000.03.31
申请人
* NEC CORPORATION
发明人
KAORI * WATANABE
分类号
B08B5/00;B08B3/12;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):H01L21/00
主分类号
B08B5/00
代理机构
代理人
主权项
地址
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