| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device and its stopping method, capable of improving the safety of a mobile object by causing stopping the mobile object to surely stop on a fixed body. SOLUTION: When a foreign substance drops on a grating platen 30, e.g. or yawing is generated on a slider part 31, a control means 53 outputs an electromagnetic value control signal to an exhaust quantity control means 52. The means 52 cuts off between respective air tubes 50, 51. Thereby the pressure of compressed air to be supplied to a floating means 32 is reduced suddenly, and the slider part 31 is brought into contact with the grating platen 30 by the magnetic suction power of a motor core (permanent magnet) while holding a parallel state with the platen 30. Consequently, the slider part 31 is braked by frictional force generated between the bearing face of a motor and the platen 30 and wakes an emergency stop within a short time.
|
