| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas flow rate controller for accurately and safely supplying gas. SOLUTION: This gas flow rate controller consists of a pneumatically driven value A for controlling a gas flow rate, by changing the aperture of a gas passage according to driving air pressure, a gas flow rate measuring instrument B having a gas rate measuring part, consisting of the combination of a sonic nozzle and a pressure sensor and a storage/operation part for arithmetically processing a signal sent from the gas flow rate measuring part and sending a control signal, a pneumatically driven stop value C, and a plate D, detachably fitting the pneumatically driven value A, the gas flow rate measuring instrument B and the stop value C on its one face and piercing the gas passage connecting these parts A to C in this order. The measuring instrument B detects and operates the gas flow rate of gas flowing into the gas passage of the plate D and sends a control signal to an external air pressure controller and the aperture of the value A is adjusted by driven air sent from the air pressure controller, on the basis of the sent data to control the gas flow rate of gas flowing into the gas passage.
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