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发明名称
摘要
申请公布号
DE2049571(A1)
申请公布日期
1972.04.13
申请号
DE19702049571
申请日期
1970.10.09
申请人
SIEMENS AG
发明人
分类号
H01L21/60;H01L23/051;(IPC1-7):01L1/02
主分类号
H01L21/60
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