| 摘要 |
<p>A clean room, comprising a cleaned air feeding device (1) having a rotor (2) adsorbing gaseous chemical substance to an adsorbing part (16) and desorbing the adsorbed gaseous chemical substance at regenerating part (17) and drive means (4) driving the rotor (2) to the adsorbing part (16) and the regenerating part (17), wherein the gaseous chemical substance contained in the air containing the gaseous chemical substance is adsorbed, for removal, to the adsorbing part (16), and cleaned air is fed into a clean room main body (32), and regenerated air heated is fed to the regenerating part (17) so as to desorb the adsorbed gaseous chemical substance from the air.</p> |
