METHOD AND APPARATUS FOR FORMATION OF THIN FILM,申请号KR1020007012604-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR FORMATION OF THIN FILM
摘要
申请公布号	KR20010043512(A)	申请公布日期	2001.05.25
申请号	KR1020007012604	申请日期	2000.11.10
申请人		发明人
分类号	C23C16/40	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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