VIA INSPECTION IN OPTICAL INSPECTION SYSTEM

摘要

An optical inspection apparatus includes a platform (14) for holding a device under inspection (32) and a light source (16) disposed to illuminate a backside portion of the device. The inspection apparatus also includes a camera (12) disposed over a front side portion of the device to receive optical energy that penetrates through the device and a diffuser (36) disposed over a front side portion of the device. The illumination source provides an image on a bottom surface of the diffuser, for processing by the camera.