| 摘要 |
In method of floating zone melting a crystalline rod, especially of semiconductor material, disposed in a sealed receptacle wherein an induction heating coil surrounds the rod and forms a molten zone therein, the rod and heating coil being relatively movable so as to pass the molten zone through the rod, the improvement is provided which comprises passing hydrogen gas of at least 99.9 percent purity into the receptacle so as to form a protective atmosphere therein, and adjusting the pressure of the atmosphere in the receptacle to a value below atmospheric pressure; and device for carrying out the foregoing method.
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