发明名称 METHOD FOR MANUFACTURING COMS SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce the number of processes, when high and low breakdown voltage transistors are formed on the same semiconductor substrate. SOLUTION: In a method for manufacturing a COMS semiconductor device, that is equipped with P-channel type high and low breakdown voltage transistors and N-channel type ones on the same semiconductor substrate, a P-source/drain layer 13 of the P-channel type high breakdown voltage transistor and a P-well region 12, where the N-channel type low breakdown voltage transistor is formed at the inside are formed by the same process, and at the same time an N-type source/drain layer 10 of the N-channel type high breakdown voltage transistor and an N-well region 9, where the P-channel type low breakdown voltage transistor is formed inside, are formed by the same process.
申请公布号 JP2001144190(A) 申请公布日期 2001.05.25
申请号 JP19990322858 申请日期 1999.11.12
申请人 SANYO ELECTRIC CO LTD 发明人 SEKIKAWA NOBUYUKI;HIRATA KOICHI;KATAGIRI TAKAYASU;ANDO WATARU
分类号 H01L21/8238;H01L21/8234;H01L27/088;H01L27/092;(IPC1-7):H01L21/823;H01L21/823 主分类号 H01L21/8238
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