发明名称 METHOD FOR STABILIZING OXIDE-SEMICONDUCTOR INTERFACE BY USING GROUP 5 ELEMENT AND STABILIZED SEMICONDUCTOR
摘要 <p>A method for stabilizing an oxide-semiconductor interface which is free from the formation of an interface layer (reactive layer) between a semiconductor and an interface oxide, and thus allows satisfactory exhibition of performance capabilities of a functional oxide and achievement of the stability of oxide-semiconductor interface, which is independent of temperature; and a stabilized semiconductor.</p>
申请公布号 WO2001037330(P1) 申请公布日期 2001.05.25
申请号 JP2000007940 申请日期 2000.11.10
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