| 摘要 |
<p>PROBLEM TO BE SOLVED: To inexpensively replenish defective wafers in short time. SOLUTION: A wafer search means searches for a candidate wafer, having processing history or a processing schedule which are identical to a defective wafer. In a defective wafer and supplemented wafer evaluation method, degree of significance 201 of the defective wafer, the significance 202 of a supplemented candidate wafer, time 203 and cost 204 on the replenishing of the candidate wafer and a wafer characteristic (quality) 205 are calculated. In a replenished wafer deciding method, the quality 206 of the replenishing of the wafer and the number of supplemented wafers are decided 207, and the replenishing of wafers is decided 208.</p> |
