发明名称 MAGNETIC SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a magnetic sensor having the contact hole of a nm order size. SOLUTION: This magnetic sensor is constructed in such a manner that upper and lower electrode layers 3 and 1 are provide, sandwiching a granular structure film 2 having a magneto-resistive effect film 3, the granular structure film 2 is a structure film made of at least two phases including an insulator matrix 22 and the granular metal 21 of a diameter d, dispersed in the insulator matrix 22, the film thickness t of the granular thickness film 2 satisfies 0<t<d, and the upper and lower electrode layers 4 and 1 conductive to each other through the magneto-resistive effect film 3 and the granular metal 21.
申请公布号 JP2001143227(A) 申请公布日期 2001.05.25
申请号 JP19990328845 申请日期 1999.11.18
申请人 FUJITSU LTD 发明人 SUGAWARA TAKAHIKO
分类号 G11B5/39;C23C14/08;G01R33/09;H01F10/08;H01F10/32;(IPC1-7):G11B5/39 主分类号 G11B5/39
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