发明名称 PROBE DEVICE, METHOD OF MANUFACTURE THEREOF, METHOD OF TESTING SUBSTRATE USING PROBE DEVICE
摘要 <p>A probe device comprises a test device (10), intermediate substrates (3), and probe substrates (4). The test device (10) is connected electrically with the proximity ends of the intermediate substrates (3) whose distal ends are connected electrically with the proximity ends of the probe substrates (4). The probe substrates (4) have distal ends adapted for electrical connection with a substrate under test. The intermediate substrates (3) are each connected electrically with a plurality of probe substrates (4). If a particular probe substrate becomes out of order, only the probe substrate (4) may be replaced; it is economically advantageous to maintain the other probe substrates (4) for use.</p>
申请公布号 WO2001036987(P1) 申请公布日期 2001.05.25
申请号 JP2000008024 申请日期 2000.11.13
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