| 发明名称 |
Method for making topographic projections |
| 摘要 |
A method for producing topographic projections, especially useful for producing many small projections of less than about 100 mum in diameter and in height. This method is useful for making contact pads of membrane probes used to test integrated circuits and spacers of liquid crystal light valves.
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| 申请公布号 |
US6236445(B1) |
申请公布日期 |
2001.05.22 |
| 申请号 |
US19960603842 |
申请日期 |
1996.02.22 |
| 申请人 |
HUGHES ELECTRONICS CORPORATION |
发明人 |
FOSCHAAR JAMES A.;GARVIN HUGH L. |
| 分类号 |
G02F1/1339;(IPC1-7):G02F1/133;G03C5/00 |
主分类号 |
G02F1/1339 |
| 代理机构 |
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代理人 |
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