| 摘要 |
PROBLEM TO BE SOLVED: To reduce a frictional coefficient in a sliding surface of a tappet used for an internal combustion engine, improve fuel consumption of the internal combustion engine, save sources, and suppress abrasion when the internal com bustion engine is operated so as to extend the life of the tappet. SOLUTION: A diamond like carbon(DLC) covered layer 16 including silicon is formed on a slide surface 14 with a cam for opening and closing driving an intake/exhaust valves, or a side surface side sliding with a guide hole disposed on a cylinder head, by using an electron beam excitation plasma CVD device.
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