| 摘要 |
PROBLEM TO BE SOLVED: To provide a waste gas treating method high in decomposition ratio, effective for a long period and capable of removing an oxidizing gas, an acidic gas and CO at the same time and a device therefor. SOLUTION: The treating device for the waste gas containing the fluorine- containing compound has a solid material treating device 1 for separating a solid material from the waste gas containing the fluorine-containing compound, an adding means for adding H2 and/or H2O or H2 and/or H2O and O2 as a decomposition assistant gas into the waste gas from the solid material treating device, a heating decomposition device 3 for heating and decomposing the waste gas, into which the decomposition assistant gas is added, and packed with γ-alumina 2 heated to 600-900 deg.C, an acidic gas treating device 5 for removing the acidic gas from the waste gas from the decomposed waste gas by heating and passages for successively connecting the devices and the treating device is preferably provided with an air ejector 7 having a function to control the pressure in the device. |
