发明名称 HIGH PULSE-RATE TYPE PULSE POWER SUPPLY SYSTEM WITH LIQUID COOLING
摘要 PROBLEM TO BE SOLVED: To provide a high pulse-rate type pulse power supply system with a liquid cooling. SOLUTION: A high pulse-rate type power supply for feeding controlled high-energy electrical pulses at a pulse-rate not lower than 2,000 Hz includes a pulse generating circuit including a charging capacitor, a semiconductor switch, and a current limiting inductor. The pulses generated in the pulse generating circuit are compressed in at least two pulse compressing circuits, and a step-up transformer increases the peak voltage of each pulse to at least 12,000 V. A very fast regulated power supply is prepared to charge the charging capacitor in a shorter time than 400 μsec., and a pulse controlling system including a programmed processor controls the charging of the charging capacitor in an error rate smaller than about 1% at a charging rate of at least 4,000 times per sec. In the preferred embodiment capable of operating at a pulse-rate of 2,000 to 4,000 Hz or greater, water-cooled saturable inductors are prepared.
申请公布号 JP2001135879(A) 申请公布日期 2001.05.18
申请号 JP20000277283 申请日期 2000.08.09
申请人 CYMER INC 发明人 PARTLO WILLIAM N;BIRX DANIEL L;NESS RICHARD M;ROTHWEIL DANIEL A;MELCHER PAUL C;SMITH BRETT D
分类号 H01S3/104;G03F7/20;H01S3/097;H01S3/225;H02M3/00;H02M9/06;H03K3/57;H03K17/80 主分类号 H01S3/104
代理机构 代理人
主权项
地址