| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acceleration sensor which is easy of manufacture and moreover, enhances the accuracy of an alignment of an operating body with an operating part at the time when the operating body is made to bond to the operating part and, consequently, reduce a crosstalk as soon as possible, and the manufacturing method of the sensor. SOLUTION: An acceleration sensor 100 outputs a signal to respond to the quantity of the flexure of a flexible part 130 to respond to an acceleration to operate on an operating body (heavy weight) 140 bonded to a fixed part 110. A recessed part 122 is formed in the bonding surface 120A, which is bonded to the operating body 140, of an operating part 120. The accuracy of an alignment of the operating body 140 with the operating part 120 is enhanced by the recessed part 122. Moreover, the bond area of the operating body 140 to the operating part 120 is made wide and the bonding strength of the operating body 140 to the operating part 120 can be increased.</p> |
