| 摘要 |
PROBLEM TO BE SOLVED: To detect whether a fluid flows in a passage or not by use of a small- sized device. SOLUTION: This flow detector comprises a silicon diaphragm 17 to be arranged within the passage, and the silicon diaphragm 17 has a sensor part 18 having a fluid through-hole 19 formed therein and a piezo resistor. When the fluid flowing in the passage passes the flow through-hole 19, the resistance of the piezo resistor is changed according to the distortion of the sensor part 18 of the silicon diaphragm 17, and the flow rate of the fluid in the passage is detected from the change of the resistance. The silicon diaphragm 17 is mounted within a housing having an upstream joint part 13 and a downstream joint part 15 through a glass base seat 21.
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