COATING PROCESS AND ITS IMAGING PROCESS

摘要

PROBLEM TO BE SOLVED: To form an extremely thin coating layer from a highly viscous material. SOLUTION: This process includes a stage for forming a first coating layer on a first movable substrate surface by using a developer and a stage for forming a thin and uniform second coating layer on the first movable substrate surface by bringing the first coating layer on the resulted first substrate into contact with the second movable substrate surface. The moving direction of the first movable substrate surface is opposite to the moving direction of the second movable substrate surface and at least one of the first substrate surface and the second substrate surface fits to the surfaces facing each other.