| 摘要 |
PROBLEM TO BE SOLVED: To enhance workability when each chip is fixed to each nozzle. SOLUTION: The nozzle support comprises a nozzle block 25 having a reference face and a hole 48, a nozzle 23 fitted in the hole 48 and provided, at the lower end thereof, with a part for fixing a chip, and a resilient member disposed in an annular space between the inner circumferential surface of the hole 48 and the outer circumferential surface of the nozzle 23. Even if an error is present in the pitch of chip supporting hole or a variation is present in the parallelism between the nozzle 23 and the chip when each nozzle is moved downward and the fixing part, at the lower end thereof, is inserted into each chip, the resilient member flexes to incline or move upward the nozzle 23 depending on the error of pitch or the variation of parallelism. |
