METHOD FOR FORMING ELECTRICALLY CONDUCTIVE FILM WHICH DIMINISHES SCATTERED AND REFLECTED LIGHT

摘要

PROBLEM TO BE SOLVED: To easily obtain a low-cost transparent electrically conductive film which diminishes scattered light on the film and reduces haze without taking a lot of trouble. SOLUTION: An SnO2 film (transparent electrically conductive film) 3 is formed on a glass substrate 2 by a CVD method and the surface of the film 3 is polished to remove the surface ruggedness 6. Scattered and reflected light generated when light is incident on the SnO2 film 3 formed on the glass substrate 2 is diminished and haze caused on the SnO2 film 3 by scattered and reflected light is reduced.