| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for saving gas in a semiconductor manufacture process, which enables reduction of the quantity of consumed gas by enabling the stop of the supply of processing gas while a semiconductor wafer is carried from a load lock chamber to a reactor chamber. SOLUTION: While a semiconductor wafer is carried from a load lock chamber 6 to a reactor chamber 3, the supply of gas not contributing to film growth is cut off, by making use of the electric signal of the timing of the load lock door 7 being opening and the compressed air outputted from an air cylinder 8 for opening the load lock door 7.
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